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MSP Corporation
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  5. MSP - Model 2840PE - Liquid Injection ...

MSP - Model 2840PE - Liquid Injection Turbo-Vaporizers

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MSP offers several high performance vaporizers, which are referred to as performance-enhanced vaporizers, or PE vaporizers. The available models include the model 2800PE and 2840PE. These PE vaporizers make use of a precision piezo-valve to control the rate of liquid flow into an atomizer to form very fine droplets for vaporization, leading to reduced thermal decomposition and by-products formation. The PE vaporizer design also increases the temperature stability of the system, while permitting the vaporizer to operate up to 300ºC in some models. The result is improved film quality as well as reduced response time of the vaporization system.
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These Performance Enhanced (PE) vaporizers elevate the performance of the popular 2800 series Turbo Vaporizer™ from MSP to a new high level unmatched by previous vaporizers. This is accomplished by:

  • reducing the atomized droplet size to further reduce thermal decomposition and by-product formation
  • increasing the temperature stability of the vaporization system
  • permitting the vaporizer to operate up to300ºC for some models
  • improving the film quality and thickness uniformity
  • reducing the response time of the vaporizer

The PE vaporizer design permits more than one atomizer head to be used and allows more than one liquid stream to be vaporized.  The small dead volume of the vaporizer also reduces the response time of the vaporizer and improves the throughput of the film deposition tool. Digital liquid flow controllers with advanced control algorithms further enhance the vaporizer performance by maintaining stable vapor output over an extended period of time or permitting short duration pulses to be generated for high speed pulsed vapor delivery in ALD applications.