Sierra Instruments, Inc.
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Flow meters for the semiconductor processing - Monitoring and Testing

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From bulk gas delivery to cleaning to purging operations, Sierra`s mass flow meters and controllers offer the simplicity and robustness demanded in these applications. Our ability to handle corrosive gases, high flow rates and multiple gases with the same unit makes Sierra`s mass flow meters and controllers a tool-makers choice.

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Corrosive Gas Control
Wafer Processing
Fab Facilities Management

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