Temperature and gas sensing solutions products for semiconductor manufacturing - Electronics and Computers

Enable advanced plasma processes control via highly accurate power delivery, frequency tuning, and multi-level pulsing. To manufacture leading-edge integrated circuits (ICs), new processes and materials are deployed for transistor or memory cell creation. Declining feature size and atomic-level precision make extreme process control essential. And new device architectures (3D-NAND and Fin FETs) drive multi-patterning (double and quadruple) demand — making innovative etch and deposition processes vital.