Tunable Soft X-ray Light Source

The new 642-1 Soft X-ray (SXR) light source from McPherson features a six position anode carousel. Users can easily change anode target materials without breaking vacuum. Using different anode materials allows tuning the emitted eV energy. The vacuum housing of the source features standard NW40K vacuum flanges (optionally DN40CF). It also features two equivalent output beams. These provide ability for sample/reference comparison and device calibration. The new source is easy to set up and provides reliable emission-line source and means for at-wavelength calibration, or metrology of SXR lithography materials, multilayers or grazing incidence optical systems for astrophysics and other fundamental research.