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Excillum - Model NanoTube N3 60 kV - Nanoscale Resolution Revolution

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The Excillum NanoTube N3 enables industry-leading resolution and stability in geometric-magnification X-ray imaging systems with no need for manual tuning. The Excillum NanoTube N3 is based on advanced electron optics and the latest tungsten-diamond transmission target technology. Automatic e-beam focusing and astigmatism correction ensures that the smallest possible, truly round spot is achieved every time, every day. The NanoTube N3 also has the unique feature of internally measuring and reporting the current spot size. In addition, advanced cooling and thermal design results in extreme stability over long exposures. This enables an unprecedented true resolution of 150 nm lines and spaces.
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  • Superior spot quality with automatic e-beam focus of true round spot 
  • 150 nm resolution consistently and automatically achieved across full kV range
  • Internal spot size measurement
  • Long-life cathode 
  • Variable spot size and power setpoints with unchanged spot position 
  • Cone-shaped front for excellent geometrical access to X-ray spot 

Voltage: 40-60 kV
High brightness emitter: LaB6
Min. resolution: 150 nm
Min. focus-object distance: 150 µm
Max. power on target: 3.6 W
Target material: Tungsten (W) on diamond
Target type: Transmission
Long term spot stability: < 100 nm1

The true round spot of the NanoTube N3 is demonstrated by the highly symmetric images of a Siemens star resolution target. The innermost features are 150 nm.

The image on the left shows a SEM micrograph of a Siemens star and an X-ray projection radiograph is shown on the right.