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Excillum - Model NanoTube N3 160 kV - ...

Excillum - Model NanoTube N3 160 kV - Nanoscale Resolution Revolution

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The Excillum NanoTube N3 enables industry-leading resolution and stability in geometric-magnification X-ray imaging systems with no need for manual tuning. The Excillum NanoTube N3 is based on advanced electron optics and the latest tungsten-diamond transmission target technology. Automatic e-beam focusing and astigmatism correction ensures that the smallest possible, truly round spot is achieved every time, every day. The NanoTube N3 also has the unique feature of internally measuring and reporting the current spot size. In addition, advanced cooling and thermal design results in extreme stability over long exposures. This enables an unprecedented true resolution of 150 nm lines and spaces.

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Superior spot quality with automatic e-beam focus of true round spot
150 nm resolution consistently and automatically achieved across full kV range
Internal spot size measurement

Long-life cathode
Variable spot size and power setpoints with unchanged spot position
Cone-shaped front for excellent geometrical access to X-ray spot

Voltage: 40-160 kV
High brightness emitter: LaB6
Min. resolution: 150 nm
Min. focus-object distance: 150 µm
Max. power on target: 16.6 W
Target material: Tungsten (W) on diamond
Target type: Transmission
Long term spot stability: < 100 nm1

The NanoTube N3 X-ray source consists of the head with dimensions 689 x 210 x 400 mm (L x W x H) including cables etc. The head has several mounting holes consistent with metric optic table mounting and is designed for upright or flat fastening, in any orientation including vertical or horizontal.

In addition, the NanoTube N3 consists of a power module and a chiller, both 4U (176 mm height, 19” rack), as well as a 1U (44 mm, 19” rack) control computer and a floor standing high-voltage generator, that all can be mounted up to 5m from the head.