cryogenic-pump Downloads
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NIKKISO cryogenic pumps are ideal for transporting liquefied petroleum gas and liquefied natural gas. They are available in various models for numerous applications and industries, such as for installation in storage tanks. NIKKISO cryogenic pumps have an extremely long life and are very efficient. They implement flow rates up to 3000 m³/h and discharge pressures up to 200 ...
Custom and larger substrate options available Base vacuum 10x-7 ? Mechanical or dry roughing pumps ? Oil diffusion or Turbo pumps ? Cryogenic vacuum / water pump Film thickness monitoring Sprint Heat rapid annealing Deposition Uniformity (+/- 3%) Ag, Al, Cr, Cu, ITO, Ni, NiCr, NiV, Ti, SS, Al2O3, Nb2O5, SiN, SiO2, Ta2O2, TiN, ...