What the results tell us :

Species identification in conjunction with library database information
Quantitative partial pressure measurement
Accurate Quantitative gas composition measurement
Trend analysis – transients analysed at millisecond rates, time resolved measurements in pulsed processes measured in the microsecond time frame
Concentration of dissolved gases in liquids
Direct analysis of vapour/solid interactions
End point detection in ion beam etch applications
Depth profile information from our SIMS analysers
Elemental mapping and surface imaging from our SIMS analysers
Static SIMS for surface contamination analysis

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